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AssigneeMitsubishi Electric Corporation
InventorsTakaki Sugino, Shinichi Hosomi, Takafumi Hara
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An infrared sensor includes a supporting body having supporting body metal wiring that allows infrared rays to pass through. The supporting body is provided so as to cover one portion of an infrared detecting portion in a different plane spatially separated from that of the infrared detecting portion. The supporting body metal wiring disposed in an interior of the supporting body is such that one portion of a cobalt iron film is oxidized by a plasma discharge being carried out in an oxygen atmosphere. According to this kind of structure, infrared rays pass through the supporting body, and are absorbed by the infrared detecting portion, because of which there is no need to provide an infrared absorption layer in an upper layer of the supporting body.
A thermal infrared detector comprising, on a substrate, an infrared detecting portion having a temperature sensor that converts a temperature change caused by an incidence of infrared rays into an electrical signal, and a supporting body having a supporting body metal wiring that reads an electrical signal from the temperature sensor, wherein
A method of manufacturing a thermal infrared detector such that an infrared detecting portion is held by a supporting body via a hollow portion between the infrared detecting portion and the substrate, the manufacturing method comprising:
Dependencies are inferred from the claim text.