A fluid supply device configured for controlling a pattern of a flow to a fluid within a clean room, wherein the clean room comprises a clean area subject to contamination, comprising:
- a front panel including multiple adjustable nozzles which enable a flexible throw pattern adjustment of an air supply, wherein the multiple adjustable nozzles are each spaced from all vertical walls of the clean room and include:
- a first fluid supply nozzle configured to provide a first fluid supply jet to provide a first flow of the fluid towards a center of the clean area;
- another first fluid supply nozzle configured to provide another first fluid supply jet to provide another first flow of the fluid towards a center of the clean area, wherein the first fluid supply jet and the another first fluid supply jet are directed along a ceiling of the clean room and towards one another;
- and
- a second fluid nozzle configured to provide a second fluid supply jet to provide a second flow of the fluid towards a perimeter of the room, the second fluid supply jet directed along the ceiling of the clean room;
- wherein a momentum of the first fluid supply jet and a momentum of the second fluid supply jet are adjusted so that the center of the clean area is flushed by the first flow and penetration of the second flow into the center of the clean area is prevented,
- wherein the vertical walls include first and second vertical walls in opposing relation to one another, and third and fourth vertical walls in opposing relation to one another,
- wherein the first fluid supply nozzle is configured to provide the first fluid supply jet to provide the first flow of the fluid in a direction away from the first wall and toward the second wall, and the another first fluid supply nozzle is configured to provide the another first fluid supply jet to provide the another first flow of the fluid in a direction away from the second wall and toward the first wall such that the first flow and the another first flow collide at the center of the room,
- wherein the second fluid supply nozzle is configured to provide the second fluid supply jet to provide the second flow of the fluid in an opposite direction of the first flow and toward the first wall to collide with the first wall such that the first and second flows collide with one another adjacent a floor of the clean room and at a position directly underneath the first and second fluid supply nozzles,
- wherein the multiple adjustable nozzles include another second fluid nozzle configured to provide another second fluid supply jet to provide another second flow of the fluid in an opposite direction of the another first flow and toward the second wall to collide with the second wall such that the another first and second flows collide with one another adjacent the floor and at a position directly underneath the another first and second fluid supply nozzles,
- wherein the front panel includes:
- a first plurality of front panels arranged in a linear array, the first plurality of front panels disposed adjacent and spaced from the first wall;
- and
- a second plurality of front panels arranged in a linear array, the second plurality of front panels disposed adjacent and spaced from the second wall, wherein each front panel of the first plurality of front panels and the second plurality of front panels has the multiple adjustable nozzles.