US 10,851,783 B2Granted

Dry vacuum pump with pressurized bearing and seal

AssigneeLeybold Aktiengesellschaft

InventorsPeter Birch, Robert Jenkins, Clive Tunna

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Abstract

A dry vacuum pump, comprising a pump housing, which forms a plurality of suction chambers, wherein rotor elements are arranged in the suction chambers, in order to convey a pump medium from a high-vacuum-side inlet to an outlet. At least one rotor element is arranged in each suction chamber. The rotor elements are connected to a rotor shaft. The rotor shaft is supported by bearings, wherein a high-vacuum-side bearing is arranged in a cut-out. A sealing device is arranged between the high-vacuum-side bearing and at least one suction chamber adjacent to the high-vacuum-side bearing. The cut-out is connected, by means of a first channel, to a region of the dry vacuum pump in which there is a higher pressure than in at least one suction chamber adjacent to the high-vacuum-side bearing.

Claims19

Dependent claims

A dry vacuum pump, comprising:

a pump housing defining a plurality of suction chambers,
rotor elements arranged in the plurality of suction chambers for conveying a pump medium from a high vacuum-side inlet to an outlet, wherein at least one rotor element of the rotor elements is arranged in each of the plurality of suction chambers,
a rotor shaft connected with the rotor elements, and
bearings supporting the rotor shaft, wherein the bearings comprise a high vacuum-side bearing arranged in a recess,
wherein a seal is arranged between the high vacuum-side bearing and one suction chamber of the plurality of suction chambers is adjacent the high vacuum-side bearing, and
wherein a first duct connects the recess with a region of the dry vacuum pump in which a higher pressure prevails than in the one suction chamber adjacent the high vacuum-side bearing.

3 more elements

Dependencies are inferred from the claim text.

Facts

Application: 15/771,776Filed 31 Oct 2016
Priority: DE 20 2015 007 606 U3 Nov 2015
Published: US 2018/0340535 A129 Nov 2018
Granted: 1 Dec 2020
Term ends: Not estimatedThe source records don’t support an estimate.

Classification7 codes

F04C 27/009
For other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine: shaft sealings specially adapted for…
F04C 18/126
Of other than internal-axis type: with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses…
F04C 25/02
Adaptations of pumps for special use of pumps for elastic fluids: for producing high vacuum
F04C 18/16
With toothed rotary pistons: with helical teeth, e.g. chevron-shaped, screw type