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US 10,851,453 B2Granted
Methods and apparatus for shutter disk assembly detection
AssigneeApplied Materials, Inc.
InventorsCheng-Hsiung Tsai, Ananthkrishna Jupudi, Eiji Asahina, Sarath Babu
Life of this patent
Estimating the term…
Abstract
Methods and apparatus for detecting a shutter disk assembly in a process chamber using a number of sensors. A first, second, and third sensor in a shutter housing for a shutter disk assembly provide indications of a status of the shutter disk assembly. The indications are used in part to determine the operational status of the shutter disk assembly along with process information from a process controller. The operational status is then used to alter a process of the process chamber when necessary.
Claims20
A method of detecting a shutter disk assembly in a process chamber, comprising:
- receiving a first sensor varying signal level that is tunable by a process controller and indicates degrees of sensor blockage from a first sensor located in a shutter housing of the process chamber, the first sensor positioned to detect a shutter arm;
- receiving a second sensor varying signal level that is tunable by the process controller and indicates degrees of sensor blockage from a second sensor located in the shutter housing of the process chamber, the second sensor positioned to detect a shutter disk;
- receiving a third sensor varying signal level that is tunable by the process controller and indicates degrees of sensor blockage from a third sensor located in the shutter housing of the process chamber, the third sensor positioned to detect the shutter disk;
- receiving process information from a process controller;
- determining an operational status of the shutter disk assembly based, at least in part, on at least one of the first sensor varying signal level, the second sensor varying signal level, the third sensor varying signal level, and the process information;
- and
- altering at least one process of the process chamber, if necessary, based on the operational status of the shutter disk assembly.
4 more elements
A method of detecting a shutter disk assembly in a process chamber, comprising:
- storing the shutter disk assembly in a shutter housing appended to the process chamber;
- receiving a first signal level that is tunable by a process controller and indicates degrees of sensor blockage from a first sensor varying signal from a first sensor located in a shutter housing of the process chamber, the first sensor positioned to detect a shutter arm;
- setting, by the process controller, a first sensor detection threshold based on the first signal level, the first sensor detection threshold indicating that a shutter disk arm is correctly stored;
- receiving a second signal level that is tunable by the process controller and indicates degrees of sensor blockage from a second sensor varying signal from a second sensor located in the shutter housing of the process chamber, the second sensor positioned to detect a shutter disk;
- setting, by the process controller, a second sensor detection threshold based on the second signal level, the second sensor detection threshold indicating that a shutter disk is correctly stored;
- receiving a third signal level that is tunable by the process controller and indicates degrees of sensor blockage from a third sensor varying signal from a third sensor located in the shutter housing of the process chamber, the third sensor positioned to detect the shutter disk;
- setting, by the process controller, a third sensor detection threshold based on the third signal level, the third sensor detection threshold indicating that the shutter disk is correctly stored;
- storing the first sensor detection threshold, the second sensor detection threshold, and the third sensor detection threshold;
- and
- retrieving the first sensor detection threshold, the second sensor detection threshold, or the third sensor detection threshold during a process to determine an operational status of the shutter disk assembly.
7 more elements
A method of detecting a shutter disk assembly in a process chamber, comprising:
- storing the shutter disk assembly in a shutter housing appended to the process chamber;
- receiving first sensor detection information from a first sensor located in a shutter housing of the process chamber, the first sensor positioned to detect a shutter arm;
- setting a first sensor detection level based on the first sensor detection information, the first sensor detection level indicating that a shutter disk arm is correctly stored;
- receiving second sensor detection information from a second sensor located in the shutter housing of the process chamber, the second sensor positioned to detect a shutter disk;
- setting a second sensor detection level based on the second sensor detection information, the second sensor detection level indicating that a shutter disk is correctly stored;
- receiving a third sensor detection information from a third sensor located in the shutter housing of the process chamber, the third sensor positioned to detect the shutter disk;
- setting a third sensor detection level based on the third sensor detection information, the third sensor detection level indicating that the shutter disk is correctly stored;
- storing the first sensor detection level, the second sensor detection level, and the third sensor detection level;
- retrieving the first sensor detection level, the second sensor detection level, or the third sensor detection level during a process to determine an operational status of the shutter disk assembly;
- and
- altering the first sensor detection level, the second sensor detection level, or the third sensor detection level to account for heat expansion or contraction of the shutter disk assembly during a process.
8 more elements
A method of detecting a shutter disk assembly in a process chamber, comprising:
- storing the shutter disk assembly in a shutter housing appended to the process chamber;
- receiving first sensor detection information from a first sensor located in a shutter housing of the process chamber, the first sensor positioned to detect a shutter arm;
- setting a first sensor detection level based on the first sensor detection information, the first sensor detection level indicating that a shutter disk arm is correctly stored;
- receiving second sensor detection information from a second sensor located in the shutter housing of the process chamber, the second sensor positioned to detect a shutter disk;
- setting a second sensor detection level based on the second sensor detection information, the second sensor detection level indicating that a shutter disk is correctly stored;
- receiving a third sensor detection information from a third sensor located in the shutter housing of the process chamber, the third sensor positioned to detect the shutter disk;
- setting a third sensor detection level based on the third sensor detection information, the third sensor detection level indicating that the shutter disk is correctly stored;
- storing the first sensor detection level, the second sensor detection level, and the third sensor detection level;
- retrieving the first sensor detection level, the second sensor detection level, or the third sensor detection level during a process to determine an operational status of the shutter disk assembly;
- and
- altering the first sensor detection level, the second sensor detection level, or the third sensor detection level to account for deposition of material on the shutter disk assembly during a process.
8 more elements
An apparatus for detecting a shutter disk assembly for a process chamber, comprising;
- a shutter housing appended to the process chamber;
- a first sensor attached to the shutter housing such that the first sensor is capable of detecting a shutter arm when the shutter arm is in the shutter housing;
- a second sensor attached to the shutter housing such that the second sensor is capable of detecting a shutter disk when the shutter disk is in the shutter housing;
- a third sensor attached to the shutter housing such that the third sensor is capable of detecting the shutter disk when the shutter disk is in the shutter housing;
- and
- a process controller that interacts with the first sensor, the second sensor, and the third sensor to detect fault conditions of the shutter disk assembly during a process by using a method of detecting the shutter disk assembly in a process chamber, comprising:
- receiving a first sensor varying signal level that is tunable by the process controller and indicates degrees of sensor blockage from a first sensor located in a shutter housing of the process chamber, the first sensor positioned to detect a shutter arm;
- receiving a second sensor varying signal level that is tunable by the process controller and indicates degrees of sensor blockage from a second sensor located in the shutter housing of the process chamber, the second sensor positioned to detect a shutter disk;
- receiving a third sensor varying signal level that is tunable by the process controller and indicates degrees of sensor blockage from a third sensor located in the shutter housing of the process chamber, the third sensor positioned to detect the shutter disk;
- receiving process information from a process controller;
- and
- determining an operational status of the shutter disk assembly based, at least in part, on at least one of the first sensor varying signal level, the second sensor varying signal level, the third sensor varying signal level, and the process information.
9 more elements
Dependencies are inferred from the claim text.