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US 10,851,452 B2Granted
Methods for evaporating and depositing high vapor pressure materials
OwnerDerek Hass, Daniel Lobo +1inventors
InventorsDerek Hass, Daniel Lobo, Daniel Christy
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Abstract
A method is disclosed, which can comprise via a transonic gas jet, depositing a thin film of LiPON on a substrate via a directed vapor deposition process. The transonic gas jet transports a thermally evaporated vapor cloud comprising the LiPON, wherein, the transonic gas jet comprises one of (a) substantially entirely nitrogen (N2) gas; or (b) nitrogen (N2) gas as a dopant in a concentration greater than 10% by volume in an inert carrier gas.
Claims13
A method comprising:
- via a transonic gas jet, depositing a thin film of LiPON on a substrate via a directed vapor deposition process, the transonic gas jet transporting a thermally evaporated vapor cloud comprising the LiPON, wherein:
- the transonic gas jet comprises one of:
- substantially entirely nitrogen (N2) gas;
- or
- nitrogen (N2) gas as a dopant in a concentration greater than 10% by volume in an inert carrier gas;
- particles are separated from the transonic gas stream such that the particles are not deposited on the substrate;
- and
- a Li3PO4 source from which Li3PO4 in the thermally evaporated vapor cloud is derived surrounds a tantalum rod in a nozzle that sources the LiPON.
5 more elements
Dependencies are inferred from the claim text.