Liquid ejecting head and liquid ejecting apparatus
AssigneeSeiko Epson Corporation
InventorsTakanori Aimono, Masao Nakayama, Motoki Takabe, Hitoshi Takaai
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Abstract
A liquid ejecting head including a plurality of pressure chambers in communication with nozzles that eject a liquid, a diaphragm that includes layers including a first layer and a second layer and that constitutes wall surfaces of the plurality of pressure chambers, a plurality of piezoelectric elements formed on a first region of the diaphragm, the piezoelectric elements each being formed to correspond to a corresponding one of the pressure chambers, and a barrier layer that is in contact with an interface between the first layer and the second layer in a second region of the diaphragm, the second region surrounding the first region.
Claims15
A liquid ejecting head comprising:
- a plurality of pressure chambers in communication with nozzles that eject a liquid;
- a diaphragm that includes layers including a first layer and a second layer and that constitutes wall surfaces of the plurality of pressure chambers;
- a plurality of piezoelectric elements formed on a first region of the diaphragm in plan view of the diaphragm, the piezoelectric elements each being formed to correspond to a corresponding one of the pressure chambers;
- and
- a barrier layer that covers an interface between the first layer and the second layer in a second region of the diaphragm, the second region surrounding the first region,
- wherein the piezoelectric elements include conductive layers to which a voltage that drives the piezoelectric elements is applied, and the barrier layer is formed of a material that is the same as that of the conductive layers.
Dependencies are inferred from the claim text.