Substrate coating device having moving unit for moving substrate holding unit and droplet discharging unit in main scanning direction and sub scanning direction and method

A coating device for drawing a pattern of a functional liquid on a substrate, the coating device comprising:

• a substrate holder configured to hold the substrate;
• a nozzle configured to discharge a droplet of the functional liquid;
• a first mover configured to move the substrate holder in a main scanning direction on a base, said base extending in a length direction in the main scanning direction;
• a second mover configured to move the nozzle in a sub scanning direction with respect to the base, wherein said main scanning direction is orthogonal to the sub scanning direction;
• a plurality of mass measurers, each mass measurer including a cup configured to receive the droplet discharged by the nozzle and a scale configured to measure a mass of the functional liquid accumulated in the cup;
• a sucking nozzle configured to be inserted into an inside of the cup and the functional liquid accumulated in the cup;
• and
• a first beam extending in the sub scanning direction and positioned above one end of the base in the main scanning direction,
• wherein the first beam includes a slide that slides the sucking nozzle in the sub scanning direction with respect to the base, and
• wherein the plurality of the mass measurers are arranged in the sub-scanning direction directly below the first beam.