US 10,850,462 B2Granted

Optical elements and method for fabricating the same

AssigneeVisEra Technologies Company Limited

InventorsSheng-Chuan Cheng, Hao-Min Chen, Chi-Han Lin, Han-Lin Wu

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Abstract

A method for fabricating an optical element is provided. A substrate is provided. A plurality of metal grids are formed on the substrate. An organic layer is formed on the substrate and the metal grids. The organic layer is etched to form a first patterned organic layer including a plurality of first protrusion portions and a plurality of first trenches surrounded by the first protrusion portions. The first patterned organic layer is etched to form a second patterned organic layer including a plurality of second protrusion portions and a plurality of second trenches surrounded by the second protrusion portions. Each second protrusion portion covers one metal grid. There is a distance between the center axis of one second protrusion portion of the second patterned organic layer and the center axis of one metal grid covered by the one second protrusion portion of the second patterned organic layer.

Claims20

Dependent claims

A method for fabricating an optical element, comprising:

providing a substrate;
forming a plurality of metal grids deposited on the substrate, wherein each metal grid has a top surface and a center axis;
forming an organic layer deposited on the substrate and the plurality of metal grids;
etching the organic layer to form a first patterned organic layer comprising a plurality of first protrusion portions and to form a plurality of first trenches surrounded by the first protrusion portions, wherein each first protrusion portion has a top surface and sidewalls, and each first trench has a bottom;
and
etching the first patterned organic layer with the first protrusion portions to form a second patterned organic layer comprising a plurality of second protrusion portions and to form a plurality of second trenches surrounded by the second protrusion portions, wherein each second protrusion portion having a center axis covers one metal grid,
wherein there is a distance between the center axis of one second protrusion portion of the second patterned organic layer and the center axis of one metal grid covered by the one second protrusion portion of the second patterned organic layer.

4 more elements

An optical element, comprising:

a substrate comprising a center region, a middle region and an edge region, wherein the middle region is located between the center region and the edge region;
a plurality of metal grids formed on the substrate located within the center region, the middle region and the edge region respectively, wherein each metal grid has a width and a center axis;
and
an organic layer formed on the substrate and the plurality of metal grids,
wherein the organic layer within the center region comprises a plurality of protrusion portions and a plurality of extension portions, wherein each extension portion is connected to adjacent protrusion portions, and each protrusion portion has a center axis, wherein each metal grid is covered by one protrusion portion of the organic layer within the center region, and there is no distance between the center axis of one protrusion portion of the organic layer and the center axis of one metal grid covered by the one protrusion portion of the organic layer within the center region, and
wherein the organic layer within the middle region comprises a plurality of protrusion portions and a plurality of extension portions, wherein each extension portion is connected to adjacent protrusion portions, and each protrusion portion has a center axis, wherein each metal grid is simultaneously covered by one protrusion portion and one extension portion of the organic layer within the middle region, and there is a distance between the center axis of one protrusion portion of the organic layer and the center axis of one metal grid covered by the one protrusion portion of the organic layer within the middle region, and
wherein the organic layer within the edge region comprises a plurality of protrusion portions and a plurality of extension portions, wherein each extension portion is connected to adjacent protrusion portions, and each protrusion portion has a center axis, wherein each metal grid is simultaneously covered by one protrusion portion and one extension portion of the organic layer within the edge region, and there is a distance between the center axis of one protrusion portion of the organic layer and the center axis of one metal grid covered by the one protrusion portion of the organic layer within the edge region, and
wherein the distance between the center axis of one protrusion portion of the organic layer and the center axis of one metal grid covered by the one protrusion portion of the organic layer within the edge region is greater than that within the middle region.

5 more elements

Dependencies are inferred from the claim text.

Facts

Application: 16/150,804Filed 3 Oct 2018
Published: US 2020/0108573 A19 Apr 2020
Granted: 1 Dec 2020
Term ends: Not estimatedThe source records don’t support an estimate.

Classification9 codes

B29D 11/00355
Production of simple or compound lenses: with a refractive index gradient
B29D 11/00682
Production of light guides: with a refractive index gradient
G02B 27/095
Using specific optical elements: refractive optical elements
H10K 71/231
Changing the shape of the active layer in the devices, e.g. patterning: by etching of existing layers