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US 10,850,302 B2Granted
Liquid ejection device, nanoimprinting apparatus, nanoimprinting liquid storage tank, method of manufacturing cured product pattern, method of manufacturing optical component, method of manufacturing circuit board, and method of manufacturing imprinting mold
AssigneeCanon Kabushiki Kaisha
InventorsToshiki Ito, Yoshimasa Araki, Kazumi Iwashita
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Abstract
A liquid ejection device includes a storage section storing a nanoimprinting liquid and also includes an ejection port which communicates with the storage section and which ejects the nanoimprinting liquid. The storage section contains a sorption medium that adsorbs or absorbs at least one selected from the group consisting of particles, metal ions, and water. The sorption tedium is not ejected from the ejection port when the nanoimprinting liquid is ejected from the ejection port.
Claims20
A liquid ejection device comprising:
- a storage section storing a liquid for nanoimprint;
- and
- an ejection port which communicates with the storage section and which ejects the liquid for nanoimprint,
- wherein the liquid ejection device is mounted to a nanoimprinting apparatus and can be detached from the nanoimprinting apparatus,
- wherein the storage section contains a sorption medium that adsorbs or absorbs at least one selected from the group consisting of particles, metal ions, and water, and
- wherein the sorption medium has a size greater than the diameter of the ejection port and is suspended in the liquid for nanoimprint in the storage section.
3 more elements
Dependencies are inferred from the claim text.