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US 10,837,603 B2Granted
Gas supply vessel
AssigneeEntegris, Inc.
InventorsJoseph Robert Despres, Edgar Daniel La Borde, Robert Zeller
Life of this patent
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Abstract
A gas supply vessel for storing and dispensing a reagent gas including a filter such that the vessel is capable of delivering the reagent gas, after it is filtered, at a high level of purity. The filter includes a porous sintered body and is effective to provide a desired level of purity of a supplied reagent gas by flowing the reagent gas through the filter during delivery from the vessel at a low pressure, at a relatively low flow rate, and with a relatively low pressure drop across the filter.
Claims6
A gas supply vessel for storing and dispensing a reagent gas, the vessel comprising:
- vessel walls defining an interior volume having an interior pressure that is sub-atmospheric;
- adsorbent within the interior volume defined by the vessel walls;
- reagent gas contained within the interior volume, the reagent gas comprising a portion that is adsorbed on the adsorbent, and a portion that is present as gaseous reagent gas in equilibrium with the adsorbed reagent gas;
- at least one valve in communication with the interior volume having an valve inlet and a valve outlet;
- an outlet in communication with the interior volume;
- and
- a filter secured to the valve inlet, the filter comprising a porous sintered body, the porous sintered body having a porosity ranging from 55 to 70 percent and a thickness in a direction of fluid flow of less than 3 millimeters, wherein the filter has a log reduction value of at least 4 at a particular MPPS, at a flow rate of 20 standard cubic centimeters per minute, and provides a pressure differential of less than 100 torr.
4 more elements
Dependencies are inferred from the claim text.