US 10,834,509 B2 · Microphone and manufacture thereof

Abstract

A microphone and its manufacturing method, relating the semiconductor techniques, are presented. The microphone comprises: a substrate comprising an opening, a first electrode layer at the bottom of the opening, and at least one groove adjacent to the first electrode layer, with the groove and the opening on two opposing sides of a bottom surface of the first electrode layer; a separation material layer filling the groove; and a second electrode layer on the separation material layer, wherein the first electrode layer, the separation material layer, and the second electrode layer form a cavity. In this inventive concept, the separation material layer on the groove works as an anchor node embedding in the substrate to increases the effective contact area and the bonding power, and to improve the bonding quality between the second electrode layer and the substrate, which results in a strengthened second electrode layer.

Claims9

Dependent claims

A microphone, comprising:

a substrate, comprising:
an opening;
a first electrode layer, wherein the opening is positioned between a surface of the first electrode layer and a face of the substrate in a first direction, wherein the first direction is perpendicular to the face of the substrate;
and
a groove set, wherein the surface of the first electrode layer is positioned between the groove set and the opening in the first direction, wherein a depth of the groove set in the first direction is less than a thickness of the first electrode layer in the first direction, wherein the opening is positioned between two portions of the groove set in a second direction, and wherein the second direction is perpendicular to the first direction;
a separation material layer filling the groove set and surrounding a cavity;
and
a second electrode layer overlapping the separation material layer and overlapping the first electrode layer, wherein the cavity is positioned between the first electrode layer and the second electrode layer in the first direction.

5 more elements

Dependencies are inferred from the claim text.

Microphone and manufacture thereof

Life of this patent

Microphone and manufacture thereof

Life of this patent

Abstract

Claims9