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US 10,833,471 B2Granted
Lithography system bandwidth control
AssigneeCymer, Inc.
InventorTanuj Aggarwal
Life of this patent
Estimating the term…
Abstract
Methods and apparatus for controlling laser firing timing and hence bandwidth in a laser capable of operating at any one of multiple repetition rates.
Claims10
Apparatus comprising:
- a laser configured to operate at any one of a plurality of repetition rates;
- a bandwidth controller configured to generate a control signal to at least partially control a bandwidth of the laser;
- a correlator comprising electronically stored feedforward correlation data correlating a value of the control signal to each of the plurality of repetition rates;
- and
- a module configured to determine at least one operating parameter of the laser and for supplying the determined operating parameter to the correlator as a feedforward value,
- wherein the correlator is configured to generate an adjustment to the control signal based at least in part on the feedforward value.
3 more elements
Apparatus comprising:
- a laser having a first chamber and a second chamber and configured to operate at any one of a plurality of repetition rates;
- a bandwidth controller configured to generate a control signal to at least partially control a bandwidth of the laser, the control signal comprising a firing timing control signal DtMOPA that at least partially controls a timing of firing in the second chamber relative to a timing of firing in the first chamber;
- a correlator comprising electronically stored feedforward correlation data correlating a value of the control signal to a repetition rate for each of the plurality of repetition rates;
- and
- a module configured to determine at least one operating parameter of the laser and for supplying the determined operating parameter to the correlator as a feedforward value,
- wherein the correlator is configured to generate an adjustment to the control signal based at least in part on the feedforward value the correlator is configured to generate an adjustment to DtMOPA according to the formula
- DtMOPA+feedforward gain*(FF(RRcurrent)−FF(RRprevious))
- where
- DtMOPA is an actual relative timing of firing in the first and second chamber, FF(RRcurrent) is a stored value of DtMOPA for a current repetition rate, FF(RRprevious) is a stored value of DtMOPA for a previous repetition rate, and
- feedforward gain is a gain factor.
7 more elements
Apparatus comprising:
- a laser having a first chamber and a second chamber and configured to operate at any one of a plurality of repetition rates;
- a bandwidth controller configured to generate a control signal to at least partially control a bandwidth of the laser, the control signal comprising a firing timing control signal DtMOPA that at least partially controls a timing of firing in the second chamber relative to a timing of firing in the first chamber;
- a correlator comprising electronically stored feedforward correlation data correlating a value of the control signal to a repetition rate for each of the plurality of repetition rates;
- and
- a module configured to determine at least one operating parameter of the laser and for supplying the determined operating parameter to the correlator as a feedforward value, wherein the at least one operating parameter is a moving average value of DtMOPA for the current repetition rate.
2 more elements
Apparatus comprising:
- a laser configured to operate at any one of a plurality of repetition rates;
- a bandwidth controller configured to generate a control signal to at least partially control a bandwidth of the laser;
- a module configured to determine at least one operating parameter of the laser and for generating a signal indicative of the determined operating parameter as a feedforward value;
- and
- a correlator arranged to receive a signal indicative of a current repetition rate and the feedforward value and comprising electronically stored feedforward correlation data correlating a value of the control signal to each of the plurality of repetition rates,
- wherein the correlator is configured to generate an adjustment to the control signal based at least in part on the feedforward value.
3 more elements
Dependencies are inferred from the claim text.