Superconducting resonator to limit vertical connections in planar quantum devices

A method comprising:

• forming a superconducting coupler comprising a superconducting connection between a first superconducting device fabricated in a plane and a second superconducting device fabricated in the plane, wherein a section of the superconducting coupler lies in a parallel plane at a clearance from the plane;
• forming a first ground plane on a first side of a component of the second superconducting device, wherein the clearance at least equals a threshold clearance, and wherein an insulator is formed between the component and the superconducting coupler to create the clearance;
• forming a second ground plane on a second side of the component of the second superconducting device;
• and
• forming an equalizing structure, wherein the equalizing structure equalizes a potential of the first ground plane with a potential of the second ground plane.

A superconductor fabrication system comprising a lithography component, wherein the superconductor fabrication system when operated on a die to fabricate a superconductor device performs operations comprising:

• forming a superconducting coupler comprising a superconducting connection between a first superconducting device fabricated in a plane and a second superconducting device fabricated in the plane, wherein a section of the superconducting coupler lies in a parallel plane at a clearance from the plane;
• forming a first ground plane on a first side of a component of the second superconducting device, wherein the clearance at least equals a threshold clearance, and wherein an insulator is formed between the component and the superconducting coupler to create the clearance;
• forming a second ground plane on a second side of the component of the second superconducting device;
• and
• forming an equalizing structure, wherein the equalizing structure equalizes a potential of the first ground plane with a potential of the second ground plane.