Low-voltage microbattery with vanadium-based cathode

A method of forming a battery, the method comprising the steps of:

• forming a first contact on a substrate;
• forming a cathode on the first contact, wherein the cathode is formed from a vanadium-containing material;
• forming a solid electrolyte on the cathode;
• forming an anode on the solid electrolyte;
• and
• forming a second contact on the anode, wherein the solid electrolyte comprises lithium niobium oxide, and wherein the step of forming the solid electrolyte on the cathode comprises the steps of:
• preparing a solution comprising lithium acetate lanthanum ethoxide and niobium oxide dissolved in a solvent;
• depositing the solution onto the cathode;
• annealing the solution under conditions sufficient to form a layer of lithium niobium oxide on the cathode;
• and
• repeating the depositing and the annealing steps n times until the solid electrolyte having a desired thickness is produced on the cathode.