Method for fabrication of a CEM device
AssigneeArm Limited
InventorsMing He, Paul Raymond Besser
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AssigneeArm Limited
InventorsMing He, Paul Raymond Besser
Estimating the term…
Disclosed is a method for the fabrication of a correlated electron material (CEM) switching device, the method comprising: forming a layer of a conductive substrate; forming a layer of a correlated electron material on the conductive substrate; forming a layer of a conductive overlay on the layer of correlated electron material; and patterning the layers whereby to form a stack comprising a conductive substrate, a CEM layer and a conductive overlay, wherein the patterning comprises the following steps: forming a hard mask on the layer of the conductive overlay; dry etching the layer of conductive overlay and the layer of correlated electron material whereby to form a partially formed stack; depositing a coating of a protective polymer over at least sidewalls of the partially formed stack; and dry etching the layer of conductive substrate.
A method for the fabrication of a correlated electron material (CEM) device, the method comprising:
A correlated electron material (CEM) device, comprising:
An integrated circuit comprising:
An electronic device comprising:
Dependencies are inferred from the claim text.