Piezoelectric element and method for manufacturing same
AssigneeSeiko Epson Corporation
InventorsTakayuki Yonemura, Yasuhiro Itayama, Chikara Kojima
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Abstract
A piezoelectric element having a vibrating section including a vibrating plate, a first electrode, a piezoelectric layer, and a second electrode, in which a crystal orientation of a piezoelectric material forming the piezoelectric layer is (100) and a crystal structure of the piezoelectric material is a tetragonal crystal, and a total thickness T1 of the vibrating plate and the first electrode and a total thickness T2 of the piezoelectric layer and the second electrode have a relationship of T1≥T2.
Claims5
A piezoelectric element comprising:
- a vibrating section including a vibrating plate, a first electrode, a piezoelectric layer, a seed layer between the first electrode and the piezoelectric layer, and a second electrode,
- wherein a crystal orientation of a piezoelectric material forming the piezoelectric layer is (100) and a crystal structure of the piezoelectric material is a tetragonal crystal, and
- a total thickness T1 of the vibrating plate, the first electrode, and the seed layer, and a total thickness T2 of the piezoelectric layer and the second electrode have a relationship of T1≥T2.
A method for manufacturing a piezoelectric element having a vibrating section including a vibrating plate, a first electrode, a piezoelectric layer, a seed layer between the first electrode and the piezoelectric layer, and a second electrode,
- wherein the piezoelectric layer is formed by a liquid phase method such that a crystal orientation of a piezoelectric material forming the piezoelectric layer is (100) and a crystal structure of the piezoelectric material is a tetragonal crystal, and
- the vibrating section is formed such that a total thickness T1 of the vibrating plate, the first electrode, and the seed layer and a total thickness T2 of the piezoelectric layer and the second electrode have a relationship of T1≥T2.
Dependencies are inferred from the claim text.