Nanowire transistor with source and drain induced by electrical contacts with negative Schottky barrier height
AssigneeAcorn Semi, LLC
InventorsPaul A. Clifton, Andreas Goebel, Walter A. Harrison
Life of this patent
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Abstract
A nanowire transistor includes undoped source and drain regions electrically coupled with a channel region. A source stack that is electrically isolated from a gate conductor includes an interfacial layer and a source conductor, and is coaxially wrapped completely around the source region, extending along at least a portion of the source region. A Schottky barrier between the source conductor and the source region is a negative Schottky barrier and a concentration of free charge carriers is induced in the semiconductor source region.
Claims34
A nanowire device, comprising:
- a nanowire disposed on a substrate, wherein a longitudinal length of the nanowire comprises:
- an undoped channel region of a first semiconductor material;
- an undoped semiconductor source region electrically coupled with a first end of the channel region;
- an undoped semiconductor drain region electrically coupled with a second end of the channel region;
- a gate stack comprising a gate insulator and a gate conductor coaxially wrapping completely around the channel region;
- a source stack electrically isolated from the gate conductor, coaxially wrapping completely around the semiconductor source region and extending along at least a portion of the semiconductor source region;
- and
- a drain stack electrically isolated from the gate conductor, coaxially wrapping completely around the semiconductor drain region and extending along at least a portion of the semiconductor drain region;
- wherein the source stack comprises a source conductor contacting the semiconductor source region and extending along at least a portion of the semiconductor source region, the source conductor comprising a degenerately doped n-type semiconductor and there is an offset in conduction band energy between the degenerately doped n-type semiconductor and the semiconductor source region such that a conduction band minimum in the degenerately doped n-type semiconductor is at a higher energy than a conduction band minimum in the semiconductor source region.
A nanowire device, comprising:
- a nanowire disposed on a substrate, wherein a longitudinal length of the nanowire comprises:
- an undoped channel region of a first semiconductor material;
- an undoped semiconductor source region electrically coupled with a first end of the channel region;
- an undoped semiconductor drain region electrically coupled with a second end of the channel region;
- a gate stack comprising a gate insulator and a gate conductor coaxially wrapping completely around the channel region;
- a source stack electrically isolated from the gate conductor, coaxially wrapping completely around the semiconductor source region and extending along at least a portion of the semiconductor source region;
- and
- a drain stack electrically isolated from the gate conductor, coaxially wrapping completely around the semiconductor drain region and extending along at least a portion of the semiconductor drain region;
- wherein the source stack comprises a source conductor contacting an interfacial layer disposed over the semiconductor source region, the interfacial layer including at least one epitaxial bilayer of group III and group V atomic monolayers.
A nanowire device, comprising:
- a nanowire disposed on a substrate, wherein a longitudinal length of the nanowire comprises:
- an undoped channel region of a first semiconductor material;
- an undoped semiconductor source region electrically coupled with a first end of the channel region;
- an undoped semiconductor drain region electrically coupled with a second end of the channel region;
- a gate stack comprising a gate insulator and a gate conductor coaxially wrapping completely around the channel region;
- a source stack electrically isolated from the gate conductor, coaxially wrapping completely around the semiconductor source region and extending along at least a portion of the semiconductor source region;
- and
- a drain stack electrically isolated from the gate conductor, coaxially wrapping completely around the semiconductor drain region and extending along at least a portion of the semiconductor drain region;
- wherein the source stack comprises a source conductor contacting the semiconductor source region and extending along at least a portion of the semiconductor source region, the source conductor comprising a degenerately p-type doped semiconductor and there is an offset in valence band energy between the degenerately doped p-type semiconductor and the semiconductor source region such that a valence band maximum in the degenerately doped p-type semiconductor is at a lower energy than a valence band maximum in the semiconductor source region.
A nanowire transistor, comprising:
- a nanowire disposed on a substrate, wherein a longitudinal length of the nanowire comprises:
- an undoped channel region of a first semiconductor material;
- an undoped semiconductor source region electrically coupled with a first end of the channel region;
- an undoped semiconductor drain region electrically coupled with a second end of the channel region;
- a gate stack comprising a gate insulator and a gate conductor coaxially wrapping completely around the channel region;
- a source stack comprising an interfacial layer and a source conductor, which is electrically isolated from the gate conductor, coaxially wrapping completely around the semiconductor source region and extending along at least a portion of the semiconductor source region;
- and
- a drain stack comprising an interfacial layer and a drain conductor, which is electrically isolated from the gate conductor, coaxially wrapping completely around the semiconductor drain region and extending along at least a portion of the semiconductor drain region;
- wherein a Schottky barrier between the source conductor and the semiconductor source region is a negative Schottky barrier and a concentration of free charge carriers is induced in the semiconductor source region.
Dependencies are inferred from the claim text.