Trenched bottom electrode and liftoff based molecular devices
OwnerPawan Tyagiinventor
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OwnerPawan Tyagiinventor
Estimating the term…
A system and method for fabricating at least one of, a molecular device element and a TBELMD including depositing a first electrode material on an insulating substrate or layer, performing a photolithography process in the first electrode material, creating a trench component in the first electrode material with the photolithography process, determining a section of the electrode material to remove based on at least one of, a molecular device element and a TBELMD to be produced, removing the section of said first electrode material, oxidizing a portion of the first electrode material, creating a first insulator part from the oxidized portion of the first electrode material, in which the oxidized portion of the first electrode material includes at least a first electrode metal surface, depositing a second electrode material, and bridging the first and second electrode material.
A method comprising the steps of:
A system comprising:
A method comprising the steps of:
Dependencies are inferred from the claim text.