Thin film transistor, manufacturing method therefor, array substrate and display device
AssigneeBoe Technology Group Co., Ltd.
InventorsFengjuan Liu, Youngsuk Song, Hongda Sun
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AssigneeBoe Technology Group Co., Ltd.
InventorsFengjuan Liu, Youngsuk Song, Hongda Sun
Estimating the term…
Provided are a thin film transistor and manufacturing method therefor, and an array substrate, and a display device. The method includes: forming a source electrode and a drain electrode on a substrate; forming a photoresist layer at the side of the source electrode and the drain electrode away from the substrate; performing exposure and developing treatment on the photoresist layer so as to obtain a photoresist pattern; successively forming a semiconductor layer, a first insulation layer and a conducting layer in sequence on at the side of the photoresist pattern away from the substrate; and removing the photoresist pattern so as to obtain an active layer a gate insulation layer and a gate electrode.
A method for manufacturing a thin film transistor, comprising:
Dependencies are inferred from the claim text.