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US 10,833,099 B2Granted
Apparatuses and methods for forming multiple decks of memory cells
AssigneeMicron Technology, Inc.
InventorsZhenyu Lu, Roger W. Lindsay, Akira Goda, John Hopkins
Life of this patent
Estimating the term…
Abstract
Some embodiments include apparatuses and methods having multiple decks of memory cells and associated control gates. A method includes forming a first deck having alternating conductor materials and dielectric materials and a hole containing materials extending through the conductor materials and the dielectric materials. The methods can also include forming a sacrificial material in an enlarged portion of the hole and forming a second deck of memory cells over the first deck. Additional apparatuses and methods are described.
Claims17
A method comprising:
- forming a first deck having alternating first conductor materials and first dielectric materials and a first hole containing materials extending through the first conductor materials and the first dielectric materials;
- forming a second deck having alternating second conductor materials and second dielectric materials over the first deck;
- forming a second hole through the second conductor materials and the second dielectric materials;
- removing a portion of the materials in the first hole forming a channel material in the first and second holes;
- and
- forming an additional dielectric material in the first and second holes, such that a portion of the additional dielectric material is surrounded by the channel material.
3 more elements
A method comprising:
- forming a first deck having alternating first conductor materials and first dielectric materials and a first hole containing materials extending through the first conductor materials and the first dielectric materials, the materials including a first dielectric material on a sidewall of the first hole;
- forming alternating levels of second conductor materials and second dielectric materials over the first deck;
- forming a second hole through the alternating levels of second conductor materials and second dielectric materials, such that the second hole exposes at least a portion of the materials in the first hole;
- recessing the second conductor materials adjacent the second hole to form recesses;
- forming a dielectric material and a charge-storage material in each of the recesses;
- forming a second dielectric material in the second hole;
- removing a portion of the materials in the first hole;
- forming a channel material in the first and second holes, the channel material contacting the first dielectric material in the first hole and the second dielectric material in the second hole;
- and
- forming an additional dielectric in the first and second hole, such that a portion of the additional dielectric material is surrounded by the channel material.
7 more elements
A method comprising:
- forming a first deck having alternating first conductor materials and first dielectric materials and a first hole containing materials extending through the first conductor materials and the first dielectric materials, the materials including a first dielectric material on a sidewall of the first hole, a first material adjacent the first dielectric material, a second dielectric material having at least a portion sounded by the first material, and a second material located over and contacting the first material;
- forming alternating levels of second conductor materials and second dielectric materials over the first deck;
- forming a second hole through the alternating levels of second conductor materials and second dielectric materials, such that the second hole exposes at least a portion of the second material in the first hole;
- recessing the second conductor materials adjacent the second hole to form recesses;
- forming a dielectric material and a charge storage material in each of the recesses;
- forming a first additional dielectric material in the second hole;
- forming a first additional material in the second hole and adjacent first additional dielectric material, such that the first additional material contacts the second material in the first hole;
- and
- further comprising:
- forming a second additional dielectric material, such that at least a portion of the second additional dielectric material is sounded by the first additional material.
7 more elements
Dependencies are inferred from the claim text.