Semiconductor apparatus having stacked gates and method of manufacture thereof
AssigneeTokyo Electron Limited
InventorsJeffrey Smith, Anton J. deVilliers, Kandabara N. Tapily, Subhadeep Kal, Gerrit J. Leusink
Life of this patent
Estimating the term…
Loading patent…
AssigneeTokyo Electron Limited
InventorsJeffrey Smith, Anton J. deVilliers, Kandabara N. Tapily, Subhadeep Kal, Gerrit J. Leusink
Estimating the term…
Aspects of the disclosure provide a semiconductor apparatus that comprises a first field-effect transistor (FET) formed on a substrate and comprising a first gate, a second FET stacked on the first FET along a direction substantially perpendicular to the substrate and comprising a second gate. The semiconductor apparatus also comprises a first routing track and a second routing track electrically isolated from the first routing track. Each of the first and second routing tracks is provided on a routing plane stacked on the second FET along said direction. The semiconductor apparatus also comprises a first conductive trace configured to conductively couple the first gate of the first FET to the first routing track, and a second conductive trace configured to conductively couple the second gate of the second FET to the second routing track.
A semiconductor apparatus comprising:
A semiconductor apparatus comprising:
Dependencies are inferred from the claim text.