Semiconductor device including source/drain contact having height below gate stack
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCharles Chew-Yuen Young, Chih-Liang Chen, Chih-Ming Lai, Jiann-Tyng Tzeng, Shun-Li Chen, Kam-Tou Sio, Shih-Wei Peng, Chun-Kuang Chen, Ru-Gun Liu
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