Phase-change material (PCM) radio frequency (RF) switches with capacitively coupled upper portions of RF terminals

A radio frequency (RF) switch comprising:

• a phase-change material (PCM);
• an RF terminal comprising a lower metal portion and an upper metal portion;
• said lower metal portion of said RF terminal being ohmically connected to said PCM;
• said upper metal portion of said RF terminal being ohmically connected to said lower metal portion of said RF terminal;
• said upper metal portion of said RF terminal comprising a first interconnect metal that is coupled to a second interconnect metal by a MOM capacitor formed by said first interconnect metal, an interlayer dielectric, and said second interconnect metal.

A method for fabricating a radio frequency (RF) switch, said method comprising:

• forming a phase-change material (PCM);
• forming a lower metal portion of an RF terminal ohmically connected to said PCM;
• forming an upper metal portion of said RF terminal comprising a first interconnect metal, said upper metal portion of said RF terminal being ohmically connected to said lower metal portion of said RF terminal;
• forming a capacitor to capacitively couple a second interconnect metal to said first interconnect metal.