Capacitive tuning circuit using RF switches with PCM capacitors and PCM contact capacitors

A capacitive tuning circuit for capacitive loading of an RF line, said capacitive tuning circuit comprising:

• RF switches connected to said RF line, each of said RF switches including:
• a phase-change material (PCM) and a heating element underlying an active segment of said PCM and extending outward and transverse to said PCM;
• RF terminals comprising lower metal portions and upper metal portions;
• said lower metal portions of said RF terminals being ohmically connected to passive segments of said PCM;
• said upper metal portions of said RF terminals made from a first interconnect metal, wherein at least one of said upper metal portions of said RF terminals is capacitively coupled by a capacitor formed in part by said first interconnect metal;
• said capacitive tuning circuit being set to a desired capacitance value when a first group of said RF switches is in an OFF state and a second group of said RF switches is in an ON state.

A capacitive tuning circuit for capacitive loading of an RF line, said capacitive tuning circuit comprising:

• RF switches connected to said RF line, each of said RF switches including:
• a phase-change material (PCM) and a heating element underlying an active segment of said PCM and extending outward and transverse to said PCM;
• RF terminals comprising a trench metal liner separated from a trench metal plug by a dielectric liner;
• said trench metal liner of said RF terminals being ohmically connected to passive segments of said PCM;
• said trench metal plug of at least one of said RF terminals being ohmically separated from and capacitively coupled to said trench metal liner of said RF terminals;
• said capacitive tuning circuit being set to a desired capacitance value when a first group of said RF switches is in an OFF state and a second group of said RF switches is in an ON state.