Display element manufacturing method and manufacturing apparatus
AssigneeNikon Corporation
InventorsTomohide Hamada, Kei Nara
Life of this patent
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Abstract
The display element manufacturing apparatus has a transporting part, which transports a substrate in a first direction, a first alignment system, which detects fiducial marks, a second alignment system, which is arranged at a prescribed distance from the first alignment system in the first direction and detects fiducial marks, calculating parts, which detect the fiducial marks and calculate the expansion/contraction of the substrate in the first direction or the transport speed of the substrate, and a processing part, which processes a prescribed position of the substrate based on at least one of the expansion/contraction of the substrate in the first direction or the transport speed of the substrate and the fiducial marks.
Claims5
A manufacturing apparatus for forming a conductive electrode or bus line on a flexible sheet substrate, the manufacturing apparatus comprising:
- a transporting part, which transports the flexible sheet substrate in a prescribed transporting direction, wherein the flexible sheet substrate has a plurality of fiducial marks along the prescribed transporting direction;
- a first alignment system, which images the fiducial marks and detects a position of the fiducial marks;
- a second alignment system, which images the fiducial marks and detects a position of the fiducial marks, wherein the second alignment system is arranged at a prescribed distance from the first alignment system in the prescribed transporting direction;
- an interferometer that measures a relative positional change between the first alignment system and the second alignment system in the prescribed transporting direction and acquires measurement values representative of the relative positional change;
- a calculating part, which detects the fiducial marks and calculates an elongation or contraction of the flexible sheet substrate in the prescribed transporting direction based on the measurement values of the interferometer and the position of the fiducial marks by each of the first alignment system and the second alignment system;
- and
- a processing part, which forms the electrode or the bus line at a prescribed position of the flexible sheet substrate based on the calculated elongation or contraction of the substrate and the position of the fiducial marks.
Dependencies are inferred from the claim text.