Fin reveal forming STI regions having convex shape between fins

An integrated circuit device comprising:

• a material layer;
• trenches in the material layer dividing the material layer into fins;
• transistors comprising the fins;
• a first insulator partially filling the trenches and contacting the material layer, wherein a top surface of the first insulator has a first convex shape between first adjacent fins of the fins and a second convex shape between second adjacent fins of the fins, wherein the highest point of curvature of the first convex shape and the second convex shape occurs at a midpoint between the fins;
• and
• a second insulator on the first insulator, the fins, and the transistors,
• wherein the midpoint of the first convex shape of the top surface of the first insulator is a first thickness from a bottom of the trenches between the first adjacent fins that are spaced a first distance from each other, and the midpoint of the second convex shape of the top surface of the first insulator is a second thickness from the bottom of the trenches between the second adjacent fins that are spaced a second distance from each other, and
• wherein the first thickness is greater than the second thickness and the first distance is greater than the second distance,
• wherein third adjacent fins of the fins are spaced a third distance that is less than the first distance and the second distance, and
• wherein the top surface of the first insulator between the third adjacent fins has a flat, planar shape.

An integrated circuit device comprising:

• a material layer;
• trenches in the material layer dividing the material layer into fins, wherein different distances between the fins include a first distance and a second distance, wherein the first distance is greater than the second distance;
• and
• an insulator partially filling the trenches and contacting the material layer,
• wherein a top surface of the insulator has a first convex shape between first adjacent fins of the fins and a second convex shape between second adjacent fins of the fins,
• wherein the highest point of curvature of the first convex shape and the second convex shape occurs at a midpoint between the fins,
• wherein the midpoint of the first convex shape of the top surface of the insulator is a first thickness from a bottom of the trenches between the first adjacent fins that are spaced a first distance from each other, and the midpoint of the second convex shape of the top surface of the insulator is a second thickness from the bottom of the trenches between the second adjacent fins that are spaced a second distance from each other,
• wherein the first thickness is greater than the second thickness and the first distance is greater than the second distance,
• wherein third adjacent fins of the fins are spaced a third distance that is less than the first distance and the second distance, and
• wherein the top surface of the insulator between the third adjacent fins has a flat, planar shape.