Substrate support with increasing areal density and corresponding method of fabricating
AssigneeLam Research Corporation
InventorsPeter Woytowitz, Vincent Burkhart, Michael Rumer, Karl Leeser
Life of this patent
Estimating the term…
Abstract
A substrate support for a substrate processing system is provided and includes a body and mesas. The mesas are distributed across and extending from and in a direction away from the body. The mesas are configured to support a substrate. Each of the mesas includes a surface area that contacts and supports the substrate. Areal density of the mesas monotonically increases as a radial distance from a center of the substrate support increases.
Claims17
A substrate support for a substrate processing system, the substrate support comprising:
- a body comprising a plurality of local regions;
- and
- a plurality of mesas distributed across the body and configured to support a substrate,
- wherein
- each of the plurality of mesas includes a surface area that contacts and supports the substrate,
- the plurality of local regions are same sized and circular shaped,
- a circumference of each of the plurality of local regions passes through a center of each of the plurality of mesas having a contact surface area portion in a corresponding one of the plurality of local regions,
- areal densities of the plurality of mesas linearly increase along a radial distance from a center of the substrate support to an outermost edge of the substrate support,
- the areal densities are each defined as a sum of contact surface area portions of the plurality of mesas within the corresponding local region divided by an area of the corresponding local region.
A substrate support for a substrate processing system, the substrate support comprising:
- a body comprising a plurality of equally sized surface area portions;
- and
- a plurality of mesas distributed across the body and configured to support a substrate,
- wherein
- each of the plurality of mesas includes a surface area that contacts and supports the substrate,
- a number of mesas per each of the equally sized surface area portions of the body increases along a radial distance from a center of the substrate support to an outermost edge of the substrate support, and
- sizes of the surface areas of the plurality of mesas increase along the radial distance from the center to the outermost edge of the substrate support.
Dependencies are inferred from the claim text.