Electrostatic chuck with embossed top plate and cooling channels

An apparatus for processing a substrate, comprising:

• a chamber defining a process region;
• an electrostatic chuck for retaining a substrate in the process region, the electrostatic chuck comprising:
• a pedestal;
• and
• a susceptor disposed on the pedestal including:
• an electrically conductive susceptor base having one or more cooling channels formed on an upper surface thereof;
• a raised central support made of a metal disposed on the electrically conductive susceptor base and disposed over the one or more cooling channels to provide a cap to cover the cooling channels formed on an upper surface of the electrically conductive susceptor base;
• and
• a dielectric top plate made of a ceramic disposed on the raised central support, wherein the dielectric top plate has an embossed top surface which forms raised projections, and wherein the dielectric top plate and raised central support include a plurality of holes to facilitate delivery of a cooling gas provided by the one or more cooling channels to a backside of the substrate when disposed on the embossed top surface of the dielectric top plate.

An electrostatic chuck for retaining a 150 mm substrate, comprising:

• a susceptor including:
• an aluminum susceptor base having one or more cooling channels formed on an upper surface thereof;
• an aluminum raised central support disposed over the one or more cooling channels to provide a cap to cover the cooling channels formed in an upper surface of the aluminum susceptor base;
• and
• a 150 mm ceramic top plate disposed on the raised central support, wherein the ceramic top plate has an embossed top surface which forms raised projections, and wherein the ceramic top plate and raised central support include a plurality of holes to facilitate delivery of a cooling gas provided by the one or more cooling channels to a backside of the substrate when disposed on the embossed top surface of the ceramic top plate, and wherein the raised central support caps the cooling channels formed on the upper surface of the aluminum susceptor base to prevent a cooling gas from escaping the cooling channels except through the plurality of holes.