EELS detection technique in an electron microscope

A method of performing Electron Energy-Loss Spectroscopy (EELS) in an electron microscope, comprising:

• providing a specimen on a specimen holder;
• providing a spectroscopic apparatus comprising a dispersion device and a detector, wherein the detector comprises a detection surface that is sub-divided into a plurality of detection zones;
• producing a beam of electrons from a source;
• using an illuminator to direct said beam so as to irradiate the specimen;
• using an imaging system to receive a flux of electrons transmitted through the specimen and direct it onto the spectroscopic apparatus;
• dispersing, with the dispersion device, said flux in a dispersion direction so as to form an EELS spectrum;
• and
• using at least a first detection zone, a second detection zone and a third detection zone of the plurality of detection zones to consecutively register a plurality of EELS spectral entities, wherein said first and said second detection zones are read out whilst said third detection zone is registering the one of said plurality of EELS spectral entities.