Plasma generating system having thermal barrier between plasma reactor and waveguide
AssigneeReCarbon, Inc.
InventorsStefan Andrew McClelland, George Stephen Leonard, III, Jae Mo Koo
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Abstract
A plasma generating system includes a waveguide for transmitting a microwave energy therethrough and an inner wall disposed within the waveguide to define a plasma cavity, where a plasma is generated within the plasma cavity using the microwave energy. The plasma generating system further includes: an adaptor mounted on a first side of the waveguide and physically separated from the waveguide by a first gap and having a gas outlet through which a gas processed by the plasma exits the plasma cavity; and an EM seal disposed in the first gap and configured to block leakage of the microwave energy through the first gap.
Claims28
A plasma generating system, comprising:
- a waveguide for transmitting a microwave energy therethrough;
- an inner wall disposed within the waveguide to define a plasma cavity, a plasma being generated within the plasma cavity using the microwave energy;
- an adaptor mounted on a first side of the waveguide and physically separated from the waveguide by a first gap and having a gas outlet through which a gas processed by the plasma exits the plasma cavity;
- and
- a first electromagnetic (EM) seal disposed in the first gap and configured to block leakage of the microwave energy through the first gap.
Dependencies are inferred from the claim text.