Charged particle beam device
AssigneeHitachi High-Tech Science Corporation
InventorsMasato Suzuki, Satoshi Tomimatsu, Makoto Sato, Tatsuya Asahata
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Abstract
To automatically repeat an operation of isolating a sample piece, which is formed by processing a sample with an ion beam, and transferring the sample piece to a sample piece holder, a charged particle beam device includes a computer configured to perform control so that, without rotating a needle with which the sample piece is fixed to the sample piece holder, a deposition film deposited on the needle is irradiated with a charged particle beam from a charged particle beam irradiation optical system.
Claims6
A charged particle beam device, which is configured to automatically perform steps of isolating a sample piece from a sample, shifting a posture of the sample piece, and fixing the sample piece to a sample piece holder, the charged particle beam device comprising:
- a charged particle beam irradiation optical system configured to apply a charged particle beam;
- a sample stage, on which the sample is to be placed, and which is configured to move;
- a needle including a movement mechanism, the movement mechanism including a rotation axis and being configured to hold and carry the sample piece;
- a holder fixing table configured to hold the sample piece holder, to which the sample piece is to be transferred;
- a gas supply portion configured to supply a gas, from which a deposition film is to be formed through application of a focused ion beam;
- and
- a computer configured to perform control so that, without rotating the needle with which the sample piece is fixed to the sample piece holder, the deposition film deposited on the needle is irradiated with the charged particle beam from the charged particle beam irradiation optical system after disconnecting the needle from the sample piece and under the state in which the needle is rotated for mounting the sample piece to the sample holder such that the deposition film which remains on the needle is removed after disconnecting the needle from the sample piece.
Dependencies are inferred from the claim text.