Ion milling apparatus and sample holder
AssigneeJEOL Ltd.
InventorsShogo Kataoka, Toru Kagawa
Life of this patent
Estimating the term…
Abstract
There is provided an ion milling apparatus and sample holder permitting one to observe a sample, which has been milled, with an electron microscope without transferring the sample to a different holding member. The ion milling apparatus has an ion source, a sample holder, and a sample stage. The sample holder includes: a holder body having a sample holding portion for holding the sample; and a cover member detachably mounted to the holder body and hermetically sealing the sample held on the sample holding portion. The holder body has a shield plate and a field-correcting plate for correcting electric fields around the sample held on the sample holding portion.
Claims10
An ion milling apparatus comprising:
- an ion source for emitting an ion beam;
- a sample holder on which a sample is loaded;
- and
- a sample stage on which the sample holder is mounted;
- wherein the sample holder comprises:
- a holder body comprising a sample holding portion for holding the sample;
- and a cover member detachably mounted to the holder body and hermetically sealing the sample held on the sample holding portion;
- and
- wherein the holder body further comprises:
- a shield plate providing a cover over a part of the sample held on the sample holding portion and shielding the ion beam;
- and a field-correcting plate for correcting electric fields around the sample held on the sample holding portion,
- wherein said field-correcting plate has one surface facing in a direction in which said sample protrudes from said shield plate and said shield plate has one surface facing in the direction in which the sample protrudes from the shield plate, and
- wherein said one surface of the field-correcting plate and said one surface of the shield plate are coplanar.
A sample holder comprising:
- a holder body having a sample holding portion for holding a sample;
- and
- a cover member detachably mounted to the holder body and hermetically sealing the sample held on the sample holding portion;
- wherein said holder body comprises:
- a shield plate operative to cover a part of the sample held on the sample holding portion and to shield an ion beam emitted from an ion source;
- and a field-correcting plate for correcting electric fields around the sample held on the sample holding portion,
- wherein said field-correcting plate has one surface facing in a direction in which said sample protrudes from said shield plate and said shield plate has one surface facing in the direction in which the sample protrudes from the shield plate, and
- wherein said one surface of the field-correcting plate and said one surface of the shield plate are coplanar.
Dependencies are inferred from the claim text.