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US 10,832,839 B1Granted
Metal resistors with a non-planar configuration
AssigneeGlobalfoundries Inc.
InventorsScott Beasor, Haiting Wang, Sipeng Gu, Jiehui Shu
Life of this patent
Estimating the term…
Abstract
Device structures and fabrication methods for an on-chip resistor. A dielectric layer includes a trench with a bottom and a sidewall arranged to surround the bottom. A metal layer is disposed on the dielectric layer at the sidewall of the trench. The metal layer includes a surface that terminates the metal layer at the bottom of the trench to define a discontinuity that extends along a length of the trench.
Claims20
A structure for a resistor, the structure comprising:
- a first dielectric layer including a trench having a bottom, a sidewall arranged to surround the bottom, and a length;
- a second dielectric layer positioned over the bottom of the trench;
- a metal layer on the first dielectric layer at the sidewall of the trench, the metal layer including a first surface that terminates the metal layer at the bottom of the trench to define a first discontinuity that extends along the length of the trench, the second dielectric layer recessed relative to the metal layer to define a space, and the metal layer surrounding the second dielectric layer;
- and
- a contact having a portion extending into the space, the portion of the contact directly coupled to the metal layer along a portion of the sidewall of the trench.
2 more elements
A structure for a resistor, the structure comprising:
- a first dielectric layer including a trench having a bottom, a sidewall arranged to surround the bottom, and a length;
- a second dielectric layer positioned over the bottom of the trench;
- a metal layer on the first dielectric layer at the sidewall of the trench, the metal layer including a first surface that terminates the metal layer at the bottom of the trench to define a first discontinuity that extends along the length of the trench, and the metal layer surrounding the second dielectric layer;
- and
- a dielectric spacer positioned in the trench between the second dielectric layer and the metal layer.
2 more elements
A structure for a resistor, the structure comprising:
- a first dielectric layer including a trench having a bottom, a sidewall arranged to surround the bottom, and a length;
- a metal layer on the first dielectric layer at the sidewall of the trench, the metal layer including a first surface that terminates the metal layer at the bottom of the trench to define a first discontinuity that extends along the length of the trench;
- and
- a second dielectric layer positioned between the metal layer and the sidewall of the trench,
- wherein the second dielectric layer is conformal with a uniform thickness, and the metal layer is conformal with a uniform thickness.
2 more elements
Dependencies are inferred from the claim text.