Seal of a vacuum valve and production method therefor

A closure element for a vacuum valve and designed for regulating a volume or mass flow and/or for a gas-tight termination of a process volume by means of interaction with a vacuum valve opening of the vacuum valve provided for the process volume, having a second seal surface corresponding to a first seal surface of the valve opening wherein the first seal surface is circumferential around the vacuum valve opening,

• wherein the second seal surface has an at least two-component material composite and the material composite has a metallic carrier component and a polymer-based seal material, and
• the seal material having a defined profile is applied onto the carrier component along a seal surface course,
• wherein, the metallic carrier component defines an inner carrier region and an outer carrier region, the metallic carrier component has a plurality of at least three defined depressions extending into the inner carrier region in the region of the respective seal surface, wherein each of the depressions respectively defines a volume and a depth and wherein at least one of the depressions in the inner carrier region is formed as a cylindrical recess that is delimited on one side having a defined depth, and
• the seal material is applied to the carrier component such that the defined profile of the seal material is provided on the outer carrier region and a part of the seal material extends at least into a part of the depressions of the carrier component and fills them by at least 50% with respect to volume and/or depth.

A closure element for a vacuum valve and designed for regulating a volume or mass flow and/or for a gas-tight termination of a process volume by means of interaction with a vacuum valve opening of the vacuum valve provided for the process volume, having a second seal surface corresponding to a first seal surface of the valve opening

• wherein the first seal surface is circumferential around the vacuum valve opening,
• wherein the second seal surface has an at least two-component material composite and the material composite has a metallic carrier component and a polymer-based seal material, and
• the seal material having a defined profile is applied onto the carrier component along a seal surface course,
• wherein, the metallic carrier component defines an inner carrier region and an outer carrier region, the metallic carrier component has a plurality of at least three defined depressions extending into the inner carrier region in the region of the respective seal surface, wherein each of the depressions respectively defines a volume and a depth and wherein at least one of the depressions in the inner carrier region is formed as a conical or pyramidal recess having decreasing width with increasing depth, and
• the seal material is applied to the carrier component such that the defined profile of the seal material is provided on the outer carrier region and a part of the seal material extends at least into a part of the depressions of the carrier component and fills them by at least 50% with respect to volume and/or depth.