Integrated measurement and micromechanical positioning apparatus for real-time test control

A control unit for controlling a measurement and positioning system, comprising:

• an interface for receiving user input from a user for controlling a measurement;
• a processor and a memory;
• computer program code in said memory, said code arranged to, when executed on said processor,
• cause said control unit to determine positioning control instructions based on said received user input,
• said positioning control instructions comprising computer-readable instructions suitable for use by a positioning controller of a measurement device in controlling movement of a micromechanical positioning actuator based on an external sensor signal to position said sensor related to an external target, said sensor signal received from said sensor to a sensor input of said positioning controller;
• and
• an instruction interface for providing said positioning control instructions to at least one measurement device of said measurement and positioning system, wherein the sensor is externally integrated to a body of the measurement device.

A method for performing measurements by a measurement device using an external sensor, said sensor being positioned related to an external target in micromechanical fashion, the method comprising:

• receiving a sensor signal from said sensor to sensor read-out electronics;
• providing a sensor input to a positioning controller from said read-out electronics based on said sensor signal, said positioning controller and said read-out electronics being integrated in a body as a physically continuous structure;
• and
• based on said sensor input, controlling by said positioning controller a movement of a micromechanical positioning actuator causing movement of the sensor with respect to said target,
• wherein the micromechanical positioning actuator is also integrated in the body as a physically continuous structure, wherein the sensor is externally integrated to said body of the measurement device.

A computer program product embodied on a non-transitory computer-readable medium, wherein said computer program product comprises computer code that, when operated on by a processor, cause a control unit of a measurement and positioning system to:

• receive user input from a user for controlling a measurement;
• determine positioning control instructions based on said received user input, said positioning control instructions comprising computer-readable instructions suitable for use by a positioning controller of a measurement device in controlling movement of a micromechanical positioning actuator based on an external sensor signal to position said sensor related to an external target, said sensor signal received from said sensor to a sensor input of said positioning controller;
• and
• provide said positioning control instructions to at least one measurement device of said measurement and positioning system, wherein the sensor is externally integrated to a body of the measurement device.