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US 10,825,940 B2Granted
Polycrystalline silicon column and polycrystalline silicon wafer
AssigneeSino-American Silicon Products Inc.
InventorsCheng-Jui Yang, Huang Wei Lin, Yu-Min Yang, Kuo-Wei Chuang, Ming-Kung Hsiao, Yuan Hsiao Chang, Bo-Kai Wang, Wen-Huai Yu, Sung Lin Hsu, I-Ching Li, Wen-Ching Hsu
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Abstract
A polycrystalline silicon wafer is provided. The polycrystalline silicon wafer, includes a plurality of silicon grains, wherein the carbon content of the polycrystalline silicon wafer is greater than 4 ppma, and the resistivity of the polycrystalline silicon wafer is greater than or equal to 1.55 Ω-cm.
Claims7
A polycrystalline silicon wafer, comprising:
- a plurality of silicon grains, wherein the carbon content of the polycrystalline silicon wafer is greater than 4 ppma, the resistivity of the polycrystalline silicon wafer is greater than or equal to 1.55 Ω-cm, and an average defect area ratio of the polycrystalline silicon wafer is less than or equal to 1.5%.
Dependencies are inferred from the claim text.