Electromagnetically actuated microelectromechanical switch
AssigneeAnalog Devices Global Unlimited Company
InventorsCheck F. Lee, Philip James Brennan
Life of this patent
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Abstract
An microelectromechanical switch uses electrostatic attraction to draw a beam toward a contact and electromagnetic repulsion to disengage and repel the beam from the contact. The electrostatic attraction is generated by a gate electrode. The electromagnetic repulsion is generated between the beam and a magnetic coil positioned on the same side of the beam as the contact. The magnetic coil produces a magnetic field, which induces a current in the beam that repels the magnetic coil. The gate electrode and the magnetic coil may be co-planar or in different planes. A circuit may also operate a coil-shaped structure act as the gate electrode and the magnetic coil, depending on the configuration.
Claims20
A microelectromechanical systems (MEMS) switch, comprising:
- a cantilevered beam connected to an anchor and spaced from an underlying substrate, the beam extending away from the anchor at least in a first direction;
- a gate electrode disposed on the substrate and underlying the beam;
- and
- a coil underlying the beam and having a center being offset, along the first direction, relative to the anchor, wherein the coil surrounds the gate electrode.
A microelectromechanical systems (MEMS) switch, comprising:
- a cantilevered beam connected to an anchor and spaced from an underlying substrate, the beam extending away from the anchor at least in a first direction;
- a gate electrode disposed on the substrate and underlying the beam;
- and
- a coil underlying the beam and having a center being offset, along the first direction, relative to the anchor, wherein the coil is next to the gate electrode on the substrate.
A microelectromechanical systems (MEMS) switch, comprising:
- a cantilevered beam connected to an anchor and spaced from an underlying substrate, the beam extending away from the anchor at least in a first direction;
- a gate electrode disposed on the substrate and underlying the beam;
- and
- a coil underlying the beam and having a center being offset, along the first direction, relative to the anchor, wherein the coil is a multi-layer coil including conductive traces positioned at multiple levels of the substrate.
A method of controlling a MEMS switch, comprising:
- electrostatically attracting a microfabricated, cantilevered beam toward an underlying electrical contact using a gate electrode underlying the microfabricated, cantilevered beam;
- and
- magnetically repulsing the microfabricated, cantilevered beam from the underlying electrical contact by inducing a current in the beam by generating a first magnetic field with a coil positioned under the beam.
A microelectromechanical systems (MEMS) switch, comprising:
- a substrate;
- a beam mounted to the substrate by an anchor, the beam extending away from the anchor at least in a first direction;
- a gate electrode disposed on the substrate and underlying the beam;
- and
- a coil disposed on the substrate and underlying the beam, the coil having a center being offset, along the first direction, relative to the anchor, wherein the coil surrounds the gate electrode.
A microelectromechanical systems (MEMS) switch, comprising:
- a substrate;
- a beam mounted to the substrate by an anchor, the beam extending away from the anchor at least in a first direction;
- a gate electrode disposed on the substrate and underlying the beam;
- and
- a coil disposed on the substrate and underlying the beam, the coil having a center being offset, along the first direction, relative to the anchor, wherein the coil is next to the gate electrode on the substrate.
A microelectromechanical systems (MEMS) switch, comprising:
- a substrate;
- a beam mounted to the substrate by an anchor, the beam extending away from the anchor at least in a first direction;
- a gate electrode disposed on the substrate and underlying the beam;
- and
- a coil disposed on the substrate and underlying the beam, the coil having a center being offset, along the first direction, relative to the anchor, wherein the coil is a multi-layer coil including conductive traces positioned at multiple levels of the substrate.
Dependencies are inferred from the claim text.