Microchannel plate and electron multiplier tube with improved gain and suppressed deterioration
AssigneeHamamatsu Photonics K.K.
InventorsTakaaki Nagata, Yasumasa Hamana, Hajime Nishimura, Daichi Masuko
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Abstract
A microchannel plate is provided with a substrate including a front surface, a rear surface, and a side surface, a plurality of channels penetrating from the front surface to the rear surface of the substrate, a first film provided on at least an inner wall surface of the channel, a second film provided on at least a part of the first film, and electrode layers provided on the front surface and the rear surface of the substrate. The first film is made of MgO, the second film is made of SiO2, and the second film is thinner than the first film.
Claims26
A microchannel plate comprising:
- a substrate including a front surface, a rear surface, and a side surface;
- a plurality of channels penetrating from the front surface to the rear surface of the substrate;
- a first film provided on at least an inner wall surface of the channel;
- a second film provided on at least a part of the first film;
- and
- electrode layers provided on the front surface and the rear surface of the substrate,
- wherein the first film is made of MgO,
- the second film is made of SiO2, and
- the second film is thinner than the first film.
An electron multiplier comprising:
- a main body including a front surface, a rear surface, and a side surface;
- a channel penetrating from the front surface to the rear surface of the main body;
- a first film provided on at least an inner wall surface of the channel;
- a second film provided on at least a part of the first film;
- and
- electrode layers provided on the front surface and the rear surface of the main body,
- wherein the first film is made of MgO,
- the second film is made of SiO2, and
- the second film is thinner than the first film.
Dependencies are inferred from the claim text.