AC power connector, sputtering apparatus and method therefor
AssigneeApplied Materials, Inc.
InventorsFrank Schnappenberger, Anke Hellmich, Stefan Keller, Marcus Bender
Life of this patent
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Abstract
An AC power connector for connecting an AC power supply with a device is provided. The AC power connector includes at least one first element connectable with the AC power supply and at least one second element connectable with the device, the first element and the second elements being arranged at a first distance with respect to each other for defining a capacitance, wherein the at least one first element and the at least one second element are rotatable with respect to each other, wherein the first element and the second element are configured for a transfer of an AC power between the at least one first element and the at least one second element.
Claims22
An AC power connector for connecting an AC power supply with a rotatable target of a sputtering apparatus, the AC power connector being configured as a rotary feed-through for transmitting power into a processing chamber, the AC power connector comprising:
- at least one first element connectable with the AC power supply and at least one second element connectable with the rotatable target so as to rotate together with the rotatable target, the first element and the second element being arranged at a first distance with respect to each other for defining a capacitance, wherein the at least one first element and the at least one second element are rotatable with respect to each other, wherein the first element and the second element are configured for a transfer of an AC power between the at least one first element and the at least one second element;
- and
- an enclosure, wherein the at least one first element and the at least one second element are provided within the enclosure, wherein the enclosure is a vacuum enclosure or an enclosure comprising a protective gas or an inert gas.
Dependencies are inferred from the claim text.