Control method for processing apparatus
AssigneeDisco Corporation
InventorSatoshi Miyata
Life of this patent
Estimating the term…
Abstract
A control method for a processing apparatus includes the steps of suspending a processing operation of a processing unit during the formation of a processed groove and then imaging the processed groove by using an imaging unit to obtain a detected image, inspecting the condition of the processed groove according to the detected image, inputting a selected one of plural parameters into an input area displayed on a touch panel from an operator in adjusting the parameters to optimize inspection conditions, moving an input cursor from the input area according to the input of the selected parameter, and executing the inspection of the processed groove by using the selected parameter input in the input area.
Claims17
A control method for a processing apparatus including a chuck table for holding a workpiece, a processing unit for forming a processed groove on the workpiece held on the chuck table, imaging means for detecting a target area of the workpiece to be processed, and a touch panel for displaying an image detected by the imaging means, the touch panel being capable of receiving an input of a plurality of parameters for various inspection conditions, the control method comprising the steps of:
- suspending a processing operation of the processing unit during the formation of the processed groove and then imaging the processed groove by using the imaging means to obtain the detected image;
- displaying the detected image of the groove on the touch panel;
- inspecting, by a control means, the condition of the processed groove according to the detected image;
- displaying on the touch panel at least one inspection condition item related to the formed groove;
- receiving, by the control means, input of a selected one of the parameters into an input area of the touch panel from an operator for adjusting the parameters to optimize the inspection conditions;
- detecting, by the control means, movement of an input cursor away from the input area;
- in response to detecting movement of the input cursor away from the input area, re-imaging the processed groove by using the imaging means to obtain a detected re-image using the selected parameter input in the input area;
- and
- displaying the detected re-image of the groove on the touch panel.
A semiconductor processing system comprising:
- a chuck table for holding and positioning a semiconductor wafer;
- a cutting blade for cutting a groove in the semiconductor wafer;
- an imaging means configured to image the groove cut in the semiconductor wafer and to output associated image data;
- image driver configured to adjust a light quantity of the imaging means according to an adjustment command to adjust a light quantity parameter;
- positioning driver configured to move the chuck table and the imaging means relative to each other according to a movement command to change an imaging position of the wafer based on a positioning parameter;
- a touch panel having a display area and an input area, wherein the input area is configured to receive a light quantity parameter and a positioning parameter;
- control means comprising:
- an image control section configured to cause the image means to image the groove based on the light quantity parameter and the positioning parameter;
- a display control section configured to receive the image data from the imaging means and form a detected image of the groove from the image data, the display control section further causing the detected image of the groove to be displayed on the touch panel;
- an inspecting section configured to perform image processing on the detected image including performing kerf inspection for the groove and to generate at least one result based on the kerf inspection wherein the at least one result is output from the inspecting section to the display control section, and the at least one result is displayed on the touch panel by the display control section;
- and
- a cursor detecting section for detecting the movement of an input cursor away from the input area of the touch panel wherein the cursor detecting section outputs a cursor movement signal to the image control section when the cursor detecting section detects the movement of the input cursor away from the input area of the touch panel;
- wherein when the image control section receives the cursor movement signal indicating the movement of the input cursor, the cursor movement signal triggers the image control section to cause the imaging means to re-image the groove according to the parameters input in the input area of the touch panel including adjusting the light quantity if the light quantity parameter was changed via input into the input area of the touch panel and/or adjusting the relative positive of the chuck table and the imaging means if the positioning parameter was changed via input into the input area of the touch panel;
- wherein the display control section receives the image data from the imaging means and forms a detected re-image of the groove from the image data, the display control section further causing the detected re-image of the groove to be displayed on the touch panel.
Dependencies are inferred from the claim text.