XPS and Raman sample analysis system and method

An X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy alignment system comprising:

• (a) a vacuum chamber;
• (b) a sample stage mounted within the vacuum chamber;
• (c) a Raman spectrometer having a Raman laser for providing a Raman laser beam;
• (d) a Raman laser transfer optical assembly mounted within the vacuum chamber and configured to focus a Raman laser beam from the Raman spectrometer on a selected area on the sample stage;
• (e) a video camera mounted outside the vacuum chamber and configured to provide images of the sample stage;
• (f) an X-ray source mounted within the vacuum chamber and configured to direct X-rays toward the same selected area of the sample stage;
• and
• (g) an X-ray alignment indicator mounted on the sample stage that provides a visual indication of X-ray location viewable by the video camera on the sample stage in response to X-rays directed toward the sample stage;
• (h) an X-ray location for the X-rays and a laser beam location for the Raman laser beam on the sample stage configured to be substantially the same size and each less than about 20 microns in diameter;
• and
• (i) a position of the Raman laser beam configured to be adjustable in X and Y directions of an X-Y plane, such that the laser beam location can be aligned with the X-ray location on the sample stage, wherein the adjustable position of the Raman laser beam is provided by the Raman spectrometer being mounted on a base plate that is mounted on the vacuum chamber, the base plate being adjustable in the X and Y directions of the X-Y plane, or by at least two kinematic mirrors located outside of the Raman spectrometer.