Solid electrolyte for ReRAM
AssigneeHeraeus Deutschland GmbH & Co. KG
InventorChristian Neumann
Life of this patent
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Abstract
A composition comprising (i) a matrix comprising a metal oxide, metal sulphide and/or metal selenide as the matrix material, the metal oxide, metal sulphide and/or metal selenide comprising at least two metals M1 and M2, and (ii) a metal M3 which is mobile in the matrix. The atomic ratio of M1 to M2 is within the range of 75:25 to 99.99:0.01; the valence states of M1, M2 and M3 are all positive; the valence state of M1 is larger than the valence state of M2; the valence state of M2 is equal to or larger than the valence state of M3; and the metals M1, M2 and M3 are different.
Claims14
A composition comprising:
- a matrix comprising a metal oxide as the matrix material, the metal oxide comprising at least two metals M1 and M2, and a metal M3 which is mobile in the matrix,
- wherein
- the atomic ratio of M1 to M2 is within the range of 75:25 to 99.99:0.01;
- the valence states of M1, M2 and M3 are all positive;
- the valence state of M1 is larger than the valence state of M2;
- the valence state of M2 is equal to or larger than the valence state of M3;
- and
- the metals M1, M2 and M3 are different, wherein
- M1 is Si or Ge,
- M2 is selected from the group consisting of Al, Ga, In, Tl, Sc, Y, La, Ac or mixtures thereof, and
- M3 is selected from the group consisting of Ag or Cu, and
- wherein the total concentration of metals different from M1, M2 and M3 in the composition is below 100 ppm, based on the total weight of the composition.
A process for the production of a composition comprising a matrix comprising one or more of a metal oxide, metal sulphide or metal selenide as the matrix material, the metal oxide, metal sulphide or metal selenide comprising at least two metals M1 and M2, and a metal M3 which is mobile in the matrix, wherein the atomic ratio of M1 to M2 is within the range of 75:25 to 99.99:0.01;
- the valence states of M1, M2 and M3 are all positive;
- the valence state of M1 is larger than the valence state of M2;
- the valence state of M2 is equal to or larger than the valence state of M3;
- and the metals M1, M2 and M3 are different, the process comprising the following steps:
- a) providing a porous oxide, sulphide or selenide of M1;
- b) infiltrating the porous oxide, sulphide or selenide of M1 with a liquid precursor of M2;
- c) infiltrating the porous oxide, sulphide or selenide of M1 with a liquid precursor of M3;
- whereby steps b) and c) are carried out simultaneously or subsequently;
- d) optionally drying the product obtained after infiltrating the porous oxide, sulphide or selenide of M1 with the liquid precursor of M2 and the liquid precursor of M3;
- e) optionally calcining the product obtained in step d), if present, or step c) in an oxidizing atmosphere at a temperature below the transition temperature of the oxide, sulphide or selenide of M1;
- and
- f) heating the product obtained in step e), if present, step d), if present or step c) to a temperature above the transition temperature of the oxide, sulphide or selenide of M1.
A process for the production of a composition comprising a matrix comprising one or more of a metal oxide, metal sulphide or metal selenide as the matrix material, the metal oxide, metal sulphide or metal selenide comprising at least two metals M1 and M2, and a metal M3 which is mobile in the matrix, wherein the atomic ratio of M1 to M2 is within the range of 75:25 to 99.99:0.01;
- the valence states of M1, M2 and M3 are all positive, the valence state of M1 is larger than the valence state of M2;
- the valence state of M2 is equal to or larger than the valence state of M3;
- and the metals M1, M2 and M3 are different, the process comprising a step of atomic layer deposition (ALD) or chemical vapor deposition (CVD).
A method of using a composition comprising a matrix comprising one or more of a metal oxide, metal sulphide or metal selenide as the matrix material, the metal oxide, metal sulphide or metal selenide comprising at least two metals M1 and M2, and a metal M3 which is mobile in the matrix, wherein the atomic ratio of M1 to M2 is within the range of 75:25 to 99.99:0.01;
- the valence states of M1, M2 and M3 are all positive;
- the valence state of M1 is larger than the valence state of M2;
- the valence state of M2 is equal to or larger than the valence state of M3;
- and the metals M1, M2 and M3 are different as a resistive switching element.
A composition comprising:
- a matrix comprising a metal oxide as the matrix material, the metal oxide comprising at least two metals M1 and M2, and a metal M3 which is mobile in the matrix,
- wherein
- the atomic ratio of M1 to M2 is within the range of 75:25 to 99.99:0.01;
- the valence states of M1, M2 and M3 are all positive;
- the valence state of M1 is +III, +IV or +V and is larger than the valence state of M2;
- the valence state of M2 is equal to or larger than the valence state of M3;
- the metals M1, M2 and M3 are different, with M1 being selected from Si or Ge, M2 being selected from the group consisting of Al, Ga, In, Tl, Sc, Y, La, Ac or mixtures thereof, and M3 being selected from the group consisting of Ag or Cu;
- the ratio of the diffusion coefficient of M3 in the composition to the diffusion coefficient of M2 in the composition is at least 1000:1;
- the total concentration of alkaline metals and alkaline-earth metals is below 100 ppm, based on the total weight of the composition;
- the amount of M2 is 0.01 to 25 atom % based on the entirety of metals, present in the composition;
- and
- the amount of M3 is 0.01 to 10 atom % based on the entirety of metals present in the composition.
A composition comprising:
- a matrix comprising a metal oxide as the matrix material, the metal oxide comprising at least two metals M1 and M2, and a metal M3 which is mobile in the matrix,
- wherein
- the atomic ratio of M1 to M2 is within the range of 90:10 to 99.99:0.01;
- the valence states of M1, M2 and M3 are all positive;
- the valence state of M1 is +III, +IV or +V and is larger than the valence state of M2;
- the valence state of M2 is equal to or larger than the valence state of M3;
- the metals M1, M2 and M3 are different, with M1 being Si, M2 being selected from the group consisting of Al or Ga, and M3 is Cu;
- the ratio of the diffusion coefficient of M3 in the composition to the diffusion coefficient of M2 in the composition is at least 1000:1;
- the total concentration of alkaline metals and alkaline-earth metals is below 100 ppm, based on the total weight of the composition;
- the amount of M2 is 0.01 to 25 atom % based on the entirety of metals present in the composition;
- and
- the amount of M3 is 0.01 to 10 atom % based on the entirety of metals present in the composition.
Dependencies are inferred from the claim text.