Determining distance correction values for laser machining a workpiece

A method of determining distance correction values of a desired distance between a laser processing nozzle on a laser processing head and a workpiece for laser processing of the workpiece, the laser processing head being configured for fixing one of the laser processing nozzle and a measurement head, the method comprising:

• before laser processing the workpiece, arranging the laser processing nozzle on the laser processing head, and scanning the workpiece by the laser processing nozzle arranged on the laser processing head along a desired movement path of a surface of the workpiece, and, during the scanning by the laser processing nozzle, capacitively measuring a distance between the laser processing nozzle and the workpiece by a distance measurement device and controlling the measured distance to be the desired distance to obtain a first actual movement path;
• before laser processing the workpiece, arranging the measuring head on the laser processing head, the measurement head having a lower lateral sensitivity of a capacitance measurement than the laser processing nozzle, and scanning the workpiece by the measurement head along the desired movement path of the surface of the workpiece, and, during the scanning by the measurement head, capacitively measuring a distance between the measurement head and the workpiece by the distance measurement device and controlling the measured distance to be the desired distance to obtain a second actual movement path;
• and
• before laser processing the workpiece, determining the distance correction values of the desired distance between the laser processing nozzle and the workpiece along the desired movement path based on the obtained first actual movement path and the obtained second actual movement path.