Vacuum apparatus
AssigneeHitachi High-Tech Corporation
InventorsSouichi Katagiri, Keigo Kasuya
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Abstract
In a vacuum apparatus including an ultrahigh vacuum evacuation pump, the ultrahigh vacuum evacuation pump is provided with a rod-shaped cathode including a non-evaporable getter alloy, a cylindrical anode disposed so as to surround the cathode, and a coil or a ring-shaped permanent magnet disposed so as to sandwich upper and lower openings of the cylindrical anode and surround the rod-shaped cathode. As a result, it is possible to reduce the size and weight of the ultrahigh vacuum evacuation pump and to dispose the vacuum evacuation pump at a desired location in the vacuum apparatus.
Claims15
A vacuum apparatus, comprising at least one ultrahigh vacuum evacuation pump,
- wherein the ultrahigh vacuum evacuation pump comprises:
- a rod-shaped cathode including a non-evaporable getter alloy;
- a cylindrical anode disposed so as to surround the cathode;
- and
- a coil or ring-shaped permanent magnet disposed so as to sandwich upper and lower openings of the cylindrical anode and surround the rod-shaped cathode, wherein
- an ionization vacuum gauge is disposed in the vicinity of the ultrahigh vacuum evacuation pump, and
- the ionization vacuum gauge is an electron source for the ultrahigh vacuum evacuation pump.
A vacuum apparatus, comprising at least one ultrahigh vacuum evacuation pump,
- wherein the ultrahigh vacuum evacuation pump comprises:
- a rod-shaped cathode including a non-evaporable getter alloy;
- a cylindrical anode disposed so as to surround the cathode;
- a coil or ring-shaped permanent magnet disposed so as to sandwich upper and lower openings of the cylindrical anode and surround the rod-shaped cathode;
- and
- an electron source is disposed between the rod-shaped cathode and the cylindrical anode.
Dependencies are inferred from the claim text.