Back to results
US 10,804,069 B2Granted
Photocathode designs and methods of generating an electron beam using a photocathode
AssigneeKLA-Tencor Corporation
InventorsKaterina Ioakeimidi, Gildardo R. Delgado, Michael E. Romero, Frances Hill, Rudy F. Garcia
Life of this patent
Estimating the term…
Abstract
A photocathode can include a body fabricated of a wide bandgap semiconductor material, a metal layer, and an alkali halide photocathode emitter. The body may have a thickness of less than 100 nm and the alkali halide photocathode may have a thickness less than 10 nm. The photocathode can be illuminated with a dual wavelength scheme.
Claims20
A photocathode comprising:
- a body fabricated of a wide bandgap semiconductor material, wherein the body has a first surface and a second surface opposite the first surface, and wherein the body has a thickness between the first surface and the second surface of less than 100 nm;
- a metal layer disposed on the first surface, wherein in the metal layer is configured as an electrical contact that applies an electric field to guide electrons toward a surface of the photocathode;
- and
- an alkali halide photocathode emitter disposed on the second surface, wherein the alkali halide photocathode has a thickness less than 10 nm.
1 more element
A method comprising:
- illuminating a photocathode with a photon beam having a dual wavelength scheme, wherein the photocathode includes a metal layer disposed on a first surface of a body and an alkali halide photocathode emitter disposed on a second surface of the body, and wherein the first surface is opposite the second surface;
- applying an electric field to the metal layer thereby guiding electrons toward a surface of the photocathode;
- and
- generating an electron beam as the photocathode is illuminated with the photon beam.
1 more element
Dependencies are inferred from the claim text.