Magnetic head including spin torque oscillator and manufacturing method for the same

A manufacturing method for a magnetic head, the magnetic head including:

• a medium facing surface configured to face a recording medium;
• a main pole configured to generate a write magnetic field for writing data on the recording medium;
• a trailing shield formed of a magnetic material and located forward relative to the main pole in a direction of travel of the recording medium;
• a spin torque oscillator disposed between the main pole and the trailing shield and electrically connected to the main pole and the trailing shield;
• and
• a substrate having a top surface,
• wherein the main pole, the trailing shield and the spin torque oscillator are disposed over the top surface of the substrate,
• the manufacturing method comprising the steps of:
• forming the main pole;
• forming the spin torque oscillator after the main pole is formed;
• and
• forming the trailing shield after the spin torque oscillator is formed, wherein the step of forming the spin torque oscillator includes:
• a step of forming a layered film on the main pole, the layered film becoming the spin torque oscillator later;
• a step of forming an interposition layer on the layered film;
• a step of forming a mask on the interposition layer;
• a first etching step of etching a portion of the interposition layer using the mask;
• a second etching step of etching a portion of the layered film using the mask and the interposition layer as an etching mask after the first etching step;
• a step of removing the interposition layer and the mask after the second etching step;
• and
• a patterning step of patterning the layered film into the spin torque oscillator after the interposition layer and the mask are removed.