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US 10,802,208 B2Granted
Broad spectrum radiation by supercontinuum generation using a tapered optical fiber
AssigneeASML Holding N.V.
InventorsKing Pui Leung, Tao Chen, Ronan James Havelin, Igor Matheus Petronella Aarts, Adel Joobeur, Joseph Carbone
Life of this patent
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Abstract
A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.
Claims18
A measurement apparatus, comprising:
- a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input and to output spatially coherent radiation with a coherence length of less than or equal to about 750 microns;
- and
- a detector system configured to receive a redirected portion of the output radiation from the measurement target.
A method, comprising:
- spectrally broadening, using a tapered optical fiber, received radiation to generate an output radiation that is spatially coherent radiation with a coherence length of less than or equal to about 750 microns;
- providing the output radiation onto a measurement target;
- and
- receiving a redirected portion of the output radiation from the measurement target at a detector system.
1 more element
Dependencies are inferred from the claim text.