Low voltage electron transparent pellicle
OwnerJohn Bennettinventor
Life of this patent
Estimating the term…
Abstract
One or more pellicles protect a cathode, the pellicles comprised of a thin layer of material that allows electrons to pass while preventing contamination of the cathode from elements originating beyond the pellicle or contamination of an outside apparatus from elements originating on or near the cathode. The pellicle can be supported by an insulator, the insulator in turn supported by a deflecting layer. The pellicle can be maintained at a positive voltage relative to the cathode, such that a voltage gradient is created between the cathode and the pellicle that accelerates electrons emitted by the cathode away from the cathode. The pellicle is located at an appropriate distance from the cathode to allow electron transmission matching the energy of the electrons at that distance.
Claims18
A system, comprising:
- a cathode;
- an apparatus creating a voltage gradient that becomes more positive as distance from the cathode increases;
- an arrangement enclosing at least the cathode and at least a portion of the voltage gradient and holding the cathode and the voltage gradient in position such that the voltage gradient originates with and extends from the cathode;
- an electrical circuit, the electrical circuit connected to and supplying a voltage difference between the cathode and apparatus, supporting the voltage gradient;
- and
- one or more pellicle structures, disposed within the arrangement, the one or more pellicle structures disposed between the cathode and the point distant from the cathode and comprising:
- a deflecting structure;
- an insulating structure;
- and
- a pellicle;
- wherein the deflecting structure of the pellicle structure nearest the cathode is in contact with a supporting surface supporting the cathode, the insulating structure is in contact with the deflecting structure without being in contact with the cathode, the deflecting layer coupling the insulating structure and the pellicle without being in contact with the cathode or apparatus, the pellicle being connected to the insulating structure without being in contact with the cathode or apparatus;
- wherein at least the pellicle structure nearest the cathode further comprises a vacuum chamber, the vacuum chamber enclosing the cathode;
- wherein the voltage gradient accelerates electrons emitted by the cathode toward the more positive regions of the gradient;
- and
- wherein the pellicle allows electrons to pass and blocks atomic particles larger than electrons.
A pellicle system for an apparatus having a voltage gradient that becomes more positive as distance from the cathode increases, comprising one or more pellicle structures, the one or more pellicle structures allowing electrons to pass and blocking atoms and molecules;
- wherein at least one pellicle structure of the one or more pellicle structures encloses the cathode, at least the pellicle structure enclosing the cathode maintained in vacuum.
A pellicle system for an apparatus having a voltage gradient that becomes more positive as distance from the cathode increases, comprising one or more pellicle structures, the one or more pellicle structures comprising a pellicle allowing electrons to pass and blocking atoms and molecules;
- wherein at least one pellicle structure of the one or more pellicle structures encloses the cathode, the pellicle within the pellicle structure enclosing the cathode maintained at a higher temperature than the cathode.
Dependencies are inferred from the claim text.