Set-up and method for spatially resolved measurement with a wavelength-dispersive X-ray spectrometer

An X-ray spectrometer comprising:

• an X-ray source emitting X-ray radiation onto a sample, the sample having a surface on which the X-ray radiation impinges,
• a slit-shaped diaphragm arrangement for shaping X-ray radiation that is diffracted or scattered at the surface of the sample or emitted by the sample,
• a collimator arrangement for collimating X-ray radiation that has passed through the diaphragm arrangement,
• an analyzer arrangement, at which part of the X-ray radiation that has passed through the collimator arrangement is reflected according to the Bragg condition, and
• a detector arrangement for receiving and detecting X-ray radiation reflected at the analyzer arrangement containing at least one detector that is spatially resolving in one dimension,
• wherein the collimator arrangement comprises a modified Soller slit with mutually parallel lamellae that form a plurality of slit-shaped passages, and at least a portion of the slit-shaped passages have partition walls aligned substantially perpendicularly to the slit-shaped passages, the partition walls being non-transmissive to X-ray radiation and restricting the transverse divergence of the X-ray radiation passing through the collimator arrangement in a direction transversely with respect to the diffraction plane of the X-ray radiation coming from the sample, wherein at least one portion of the partition walls of the modified Soller slit is segmented in the direction of the local beam path.