Additively manufactured gas distribution manifold

An apparatus comprising:

• a manifold constructed by additive manufacturing, the manifold including:
• a mixing chamber;
• and
• portions of a plurality of flow paths, each flow path including:
• a first fluid flow component interface including a first fluid flow component interface inlet and a first fluid flow component interface outlet;
• a second fluid flow component interface including a second fluid flow component interface inlet and a second fluid flow component interface outlet;
• a first tubular passage fluidically connecting the mixing chamber with the first fluid flow component interface outlet of that flow path;
• and
• a second tubular passage fluidically connecting the first fluid flow component interface inlet of that flow path with the second fluid flow component interface outlet of that flow path, wherein:
• each first tubular passage has a first inner diameter and a first outer diameter,
• each second tubular passage has a second inner diameter and a second outer diameter,
• the first fluid flow component interface, the second fluid flow component interface, the first tubular passage, and the second tubular passage of each flow path are a unitary body,
• each first fluid component interface is fluidically interposed between the first tubular passage of that flow path and the second tubular passage of that flow path, and
• for at least one flow path, the second tubular passage has one or more bends with a bend radius less than ten times the second outside diameter of the second tubular passage.